We have been the private label provider of RF Components for a variety of OEM companies from around the world. From RF Matching Networks to RF Components like those described below. These includes companies and systems like Leybold Heraeus Z550, Leybold Sputtering System Z590, Leybold BPS ZH 620, Unaxis Corona ZH620 Sputtering System, Balzers Emerald ZH-620 and Unaxis ZH 620 AluFill Sputter Systems. Our components have a significantly amount of engineering time associated with them along with use in production systems all around the world in a variety of industries and applications. We have these in stock or can manufacture quickly for your system.
Impedance Matching Networks:
- Power range: 300 W to 30 kW
- Wide impedance range
- Various circuits for different applications available (L-, T-, Pi-, N)
- Output currents of up to 300 A for capacitive loads of extremely low impedance
Switches:
- Cathode switching of up to 60 A
- Modular switching matrixes
- Coaxial power switches
Power-Split:
- cost-effective simultaneous operation of two or more cathodes with one power supply
Transmission and Connections:
- RF coaxial lines
- RF plug-in connectors
Phase Shifters:
- Simultaneous operation of two or more cathodes
- 2 channel or 6 channel
Filters:
- Protection of other components against RF influence
Measurement:
- DC potential measurement
- Plasma recognition
- RF voltage and currents
- Impedance
- Effective, reactive and apparent power
Autotuning:
- Calculating system (ACAS)
- High speed tuning
- High precision
- High reproducibility
Control System:
- Integrated controller (ASC)
- RS 232 or Profibus-Interface
- A/D-Interface (optional)
- ETHOS-Software to configure the matching network
- Manual interface (optional)